High-density optrode-electrode neural probe using SixNy photonics for in vivo optogenetics

L. Hoffman, M. Welkenhuysen, A. Andrei, S. Musa, Z. Luo, S. Libbrecht, S. Severi, P. Soussan, V. Baekelandt, S. Haesler, G. Gielen, R. Puers, D. Braeken
January 2015
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Type
Conference paper
Publication
2015 IEEE International Electron Devices Meeting (IEDM)